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Imaging and analysis of 3‐D structure using a dual beam FIB
Author(s) -
McGrouther D.,
Munroe P.R.
Publication year - 2007
Publication title -
microscopy research and technique
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.536
H-Index - 118
eISSN - 1097-0029
pISSN - 1059-910X
DOI - 10.1002/jemt.20406
Subject(s) - instrumentation (computer programming) , dual (grammatical number) , focused ion beam , ion beam analysis , beam (structure) , computer science , ion beam , nanotechnology , materials science , ion , optics , physics , programming language , art , literature , quantum mechanics
The application of focused ion beam instrumentation in the generation of three‐dimensional microstructural data is described. The methodologies used to acquire and manipulate this data are explained, and the technique is illustrated by a number of examples from the material sciences. The limitations of this method, and practical pointers to the generation of meaningful data, are also discussed. Microsc. Res. Tech., 2007. © 2007 Wiley‐Liss, Inc.