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Nanobeam electron diffraction and high resolution imaging analysis of InN films grown on sapphire
Author(s) -
Liu Zongwen,
Kinsey Robert J.,
Durbin Steven M.,
Ringer Simon P.
Publication year - 2007
Publication title -
microscopy research and technique
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.536
H-Index - 118
eISSN - 1097-0029
pISSN - 1059-910X
DOI - 10.1002/jemt.20398
Subject(s) - high resolution transmission electron microscopy , wurtzite crystal structure , sapphire , transmission electron microscopy , materials science , electron diffraction , diffraction , electron microscope , crystallography , optics , nanotechnology , chemistry , physics , laser
A JEOL JEM‐3000F field emission, analytical, high‐resolution transmission electron microscope (HRTEM) was used to study InN films grown on sapphire substrates. It was found that, while the InN films maintained the hexagonal (wurtzite) structure, InN nanodomains with a cubic (zincblende) structure were also formed in the films. Nanobeam electron diffraction techniques were applied for identification of the cubic phase. The identification of the cubic InN was confirmed by HRTEM structural imaging. The cubic InN nanodomains are 3–10 nm in diameter, and are orientated in two different orientations with their [110] cubic and [ 11 0] cubic axes parallel to each other and their (1 1 1) cubic planes parallel to the (0001) hex plane of the hexagonal InN. Microsc. Res. Tech., 2007. © 2007 Wiley‐Liss, Inc.