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Nanoanalysis by a high‐resolution energy filtering transmission electron microscope
Author(s) -
Mitome Masanori,
Bando Yoshio,
Golberg Dmitri,
Kurashima Keiji,
Okura Yoshihiro,
Kaneyama Toshikatsu,
Naruse Mikio,
Honda Yoshiaki
Publication year - 2004
Publication title -
microscopy research and technique
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.536
H-Index - 118
eISSN - 1097-0029
pISSN - 1059-910X
DOI - 10.1002/jemt.20025
Subject(s) - acceleration voltage , resolution (logic) , electron microscope , transmission electron microscopy , indium , microscope , materials science , scanning transmission electron microscopy , electron energy loss spectroscopy , image resolution , energy (signal processing) , surface plasmon , high resolution transmission electron microscopy , plasmon , optics , electron , optoelectronics , cathode ray , nanotechnology , physics , computer science , artificial intelligence , quantum mechanics
An energy‐filtering transmission electron microscope with 300 kV acceleration voltage was developed and the spatial resolution of elemental distribution images was improved. Observing oxygen monolayers in Al 11 O 3 N 9 , it was shown that the actual resolution attained is up to 0.5 nm. Surface plasmon loss images of silver particles were taken with a resolution of better than 0.4 nm. Furthermore, the sensitivity is sufficiently high to distinguish indium content differences of 2.5 atomic percent in In x Al 1‐x As. This performance is good enough to analyze elemental distribution with atomic‐level resolution. Furthermore, since analysis with the energy‐filtering microscope is easy and practical, nanoanalysis may come into wide use not only in academic fields but also in industry. Microsc. Res. Tech. 63:140–148, 2004. © 2004 Wiley‐Liss, Inc.