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Sample preparation technique for cross‐sectional transmission electron microscopy of quantum wire structures
Author(s) -
Chen YuPei,
Reed Jason D.,
O'Keefe Sean S.,
Schaff William J.,
Eastman Lester F.
Publication year - 1993
Publication title -
microscopy research and technique
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.536
H-Index - 118
eISSN - 1097-0029
pISSN - 1059-910X
DOI - 10.1002/jemt.1070260208
Subject(s) - transmission electron microscopy , sample preparation , sample (material) , materials science , electron microscope , quantum wire , quantum , quantum dot , transmission (telecommunications) , energy filtered transmission electron microscopy , nanotechnology , scanning transmission electron microscopy , optics , chemistry , physics , chromatography , computer science , telecommunications , quantum mechanics
A novel cross‐sectional sample preparation technique for quantum wire (QWR) structures is described. By coating a thin layer of Au with a designed pattern on the sample as a marker to indicate the position of the wire pattern, the location of the thinned area can be controlled precisely. An example of applying this technique to an InGaAs/GaAs QWR structure is demonstrated. This technique can also be applied to any other small dimensional structures or devices with specific regions of interest. © Wiley‐Liss, Inc.
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