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Introduction to the ESEM instrument
Author(s) -
Danilatos G. D.
Publication year - 1993
Publication title -
microscopy research and technique
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.536
H-Index - 118
eISSN - 1097-0029
pISSN - 1059-910X
DOI - 10.1002/jemt.1070250503
Subject(s) - environmental scanning electron microscope , optics , perspective (graphical) , optical instrument , nanotechnology , micro level , computer science , materials science , electron microscope , engineering , physics , artificial intelligence , civil engineering , economic impact analysis
An outline is presented of the first commercial environmental scanning electron microscope (ESEM). A concise description of this instrument and its operation, from a user's perspective, is given. More specifically, the description includes the electron optics, pressure stages and control, detection modes, resolution, and ancillary equipment. © 1993 Wiley‐Liss, Inc.