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A novel method for the cross‐sectional TEM preparation of thin films deposited onto water‐soluble substrates
Author(s) -
Sáfrán György,
Panine Pierre
Publication year - 1993
Publication title -
microscopy research and technique
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.536
H-Index - 118
eISSN - 1097-0029
pISSN - 1059-910X
DOI - 10.1002/jemt.1070250412
Subject(s) - materials science , substrate (aquarium) , thin film , layer (electronics) , sample preparation , chemical engineering , nanotechnology , composite material , chromatography , chemistry , oceanography , geology , engineering
A preparational method was developed solving the problem of cross‐sectional TEM preparation of thin films and layer systems deposited onto water‐soluble substrates. The technique is based on the replacement of the sample onto steady substrate, followed by mechanical and ion beam thinning. Cross‐sectional TEM micrographs of Ag and Ag/Ag 2 Se layers are shown presenting the efficiency of this novel technique. © 1993 Wiley‐Liss, Inc.