Premium
The influence of lens chromatic aberration on electron energy‐loss spectroscopy quantitative measurements
Author(s) -
Yang YingYing,
Egerton Raymond F.
Publication year - 1992
Publication title -
microscopy research and technique
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.536
H-Index - 118
eISSN - 1097-0029
pISSN - 1059-910X
DOI - 10.1002/jemt.1070210412
Subject(s) - chromatic aberration , optics , lens (geology) , electron energy loss spectroscopy , chromatic scale , spherical aberration , spectroscopy , resolution (logic) , materials science , spectrometer , transmission electron microscopy , electron microscope , physics , computer science , quantum mechanics , artificial intelligence
An investigation has been made into the effect of chromatic aberrations of a pre‐spectrometer lens system on quantitative elemental analysis by electron energy loss spectroscopy (EELS). In transmission electron microscopy (TEM) diffraction mode, the measured effects are typically 150–330 times larger than if only objectiv‐lens chromatic aberration were important. We discuss several methods of avoiding errors arising from chromatic aberration, including selection of a suitable optical mode (dependent on the desired spatial resolution), adjustment of the TEM imaging system so as to focus the system for a chosen energy loss, and analysis of a large area of a uniform specimen. © 1992 Wiley‐Liss, Inc.