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Observation of atomic steps on single crystal surfaces by a commercial scanning electron microscope
Author(s) -
Uchida Yuji,
Weinberg Gisela,
Lehmpfuhl Gunter
Publication year - 1992
Publication title -
microscopy research and technique
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.536
H-Index - 118
eISSN - 1097-0029
pISSN - 1059-910X
DOI - 10.1002/jemt.1070200410
Subject(s) - scanning electron microscope , crystal (programming language) , electron microscope , materials science , electron beam induced deposition , conventional transmission electron microscope , electron , optics , single crystal , scanning transmission electron microscopy , secondary electrons , chemistry , crystallography , physics , quantum mechanics , programming language , computer science
Atomic steps on (111) and (100) crystal surfaces of Pt were observed using a commercial scanning electron microscope (SEM) in secondary electron mode. By comparing the SEM images and those by reflection electron microscopy (REM), the observed contrast was confirmed to be that from atomic steps on crystal surfaces. The contrast mechanism is briefly discussed. One application of this imaging technique is also shown.