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Microanalysis Using Secondary Ion Mass Spectrometry
Author(s) -
Ling YongChien
Publication year - 1994
Publication title -
journal of the chinese chemical society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.329
H-Index - 45
eISSN - 2192-6549
pISSN - 0009-4536
DOI - 10.1002/jccs.199400045
Subject(s) - microanalysis , chemistry , secondary ion mass spectrometry , mass spectrometry , analytical chemistry (journal) , ceramic , boron , nanotechnology , chromatography , materials science , organic chemistry
Secondary ion mass spectrometry (SIMS) has inherent features of high sensitivity, great dynamic range, and capability to provide spatially resolved chemical information making it well suited for trace and microanalysis of diverse materials. The various SIMS methods used to derive the boron distribution in hepatoma cells, to investigate the intcr‐iayer reactions in multi‐layer ceramic structural materials, and to evaluate the effects of fabrication on microstructural and functional properties in semiconductor devices, are presented to illustrate possible roles of SIMS in microanalysis.