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P‐11: Development of Easy‐debonding IGZO TFT Array on Flexible PI Substrate at Low Temperature
Author(s) -
Li XiFeng,
Zhu LeYong,
Chen LongLong,
Shi JiFeng,
Sun Xiang,
Zhang JianHua,
Xin EnLong,
Chen ChengChung,
Zang HaoChun,
Huo SiTao,
Ling ZhiHua,
Ma Jun
Publication year - 2014
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/j.2168-0159.2014.tb00255.x
Subject(s) - polyimide , lamination , materials science , substrate (aquarium) , thin film transistor , optoelectronics , polymer substrate , composite material , polymer , layer (electronics) , oceanography , geology
Active Matrix displays on light weight, non‐fragile, plastic substrates are of great interests for portable applications. One of the challenges has been device performance processed at low temperature: in both carrier mobility and operation stability. Another challenge has been bonding‐debonding efficiency. IGZO TFT array was fabricated on a lamination‐based polyimide (PI) flexible substrate at 200°C and is easily debonded without additional equipment. Good electrical characteristic and high stability of the IGZO TFT have been demonstrated.