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P‐10: Oxide TFT Fabrication by Nano‐Rheology Printing for Display Application
Author(s) -
Koyama Hiroaki,
Fukada Kazuhiro,
Murakami Yoshitaka,
Tue Phan Trong,
Tanaka Shogo,
Inoue Satoshi,
Shimoda Tatsuya
Publication year - 2014
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/j.2168-0159.2014.tb00254.x
Subject(s) - thin film transistor , materials science , active matrix , rheology , fabrication , oxide , nano , oxide thin film transistor , transistor , optoelectronics , nanotechnology , layer (electronics) , composite material , electrical engineering , metallurgy , engineering , medicine , alternative medicine , pathology , voltage
A nano‐rheology printing method was used to fabricate oxide thin‐film transistors (TFTs). This method utilizes the rheological properties of oxide precursor gels that are imprinted at an elevated temperature. TFTs designed for an active matrix array were successfully developed with high alignment accuracy, and the operation of its transistors was confirmed.

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