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63.4L: Late‐News Paper : New Technology for Thinner Cover Glass Substrates: Improvement of Surface Strength by Polishing after Chemical Strengthening
Author(s) -
Ohkawa Hiroyuki,
Yamanaka Kazuhiko,
Saiki Hitoshi,
Nakagawa Aya,
Fukawa Makoto,
Ishimaru Naohiko
Publication year - 2013
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/j.2168-0159.2013.tb06361.x
Subject(s) - polishing , materials science , mechanical strength , composite material , chemical mechanical planarization , metallurgy
Recently, thinner cover glass is required therefore the glass strength is more important. It was found that surface polishing after chemical strengthening improved surface strength. In chemical strengthening process hydrogen enters the glass surface and creates chemical defects. Surface strength is improved by removing them.