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10.4: Improvement of Stability on a‐IGZO LCD
Author(s) -
Wu Chun Wei,
Yoo Seong Yeol,
Ning Ce,
Yang Wei,
Shang Guang Liang,
Wang Ke,
Liu Chien Hung,
Liu Xiang,
Yuan Guang Cai,
Chen Jian,
Xu Yubo,
Lee Woobong,
Yu Jian Wei,
Lee Doo Hee
Publication year - 2013
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/j.2168-0159.2013.tb06150.x
Subject(s) - thin film transistor , liquid crystal display , reliability (semiconductor) , materials science , process (computing) , amorphous solid , optoelectronics , computer science , nanotechnology , crystallography , chemistry , physics , operating system , power (physics) , layer (electronics) , quantum mechanics
We have developed 10‐inch 300PPI and 65‐inch ultra high‐definition FFS LCD using amorphous In‐Ga‐Zn‐O(IGZO) TFT. After improvement of TFT's process and structure, the TFT performance is good enough for TFT‐LCD. In this report, we discuss our IGZO TFT process, uniformity and reliability.