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P‐58: Accelerating Phase Shifting Technique in Quantitative Differential Interference Contrast System for Critical Dimension Measurement of TFT Substrate
Author(s) -
Lin WenChiuan,
Yu ShengKang,
Lin ShihChieh
Publication year - 2012
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/j.2168-0159.2012.tb06034.x
Subject(s) - differential interference contrast microscopy , interference (communication) , substrate (aquarium) , contrast (vision) , dimension (graph theory) , differential (mechanical device) , optics , differential phase , critical dimension , materials science , phase (matter) , optoelectronics , computer science , physics , mathematics , telecommunications , channel (broadcasting) , oceanography , quantum mechanics , microscopy , pure mathematics , thermodynamics , geology
A quantitative differential interference contrast (DIC) technique is proposed to measure the step height of TFT substrate, which is widely applied in display devices. Theoretical comparisons between different phase shifting techniques of DIC are given. Not only series of simulations are conducted but also the preliminary experiments of TFT dimension measurement are presented. The proposed accelerating phase shifting DIC technique might be adopted to topography measurement of optical components in industry.