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P‐140L: Late‐News Poster : Crystallization of Amorphous Silicon Films on Flexible Glass by Blue‐Multi‐Diode‐Laser Annealing as a New LTPS
Author(s) -
Noguchi Takashi,
Nishinohara Takuma,
Mugiraneza Jean de Dieu,
Shirai Katsuya,
Okada Tatsuya,
Itoh Taketsugu
Publication year - 2012
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/j.2168-0159.2012.tb05992.x
Subject(s) - materials science , crystallinity , annealing (glass) , crystallization , amorphous solid , amorphous silicon , thin film , silicon , optoelectronics , diode , laser , blue laser , composite material , optics , crystalline silicon , nanotechnology , chemical engineering , crystallography , chemistry , physics , engineering
In this paper, we have successfully crystallized the amorphous silicon thin films on flexible thin glass of 100 μm by adopting blue‐multi‐diode‐laser annealing. The crystallized films on flexible thin glass showed high crystallinity and good electrical properties as well as on the conventional thick glass with the thickness of 0.7 mm.