
Selective rounding for pyramid peaks and valleys improves the performance of SHJ solar cells
Author(s) -
Du Junlin,
Meng Fanying,
Fu Haoxin,
Sun Lin,
Zhang Liping,
Han Anjun,
Shi Jianhua,
Xie Yi,
Liu Zhengxin
Publication year - 2021
Publication title -
energy science and engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.638
H-Index - 29
ISSN - 2050-0505
DOI - 10.1002/ese3.900
Subject(s) - pyramid (geometry) , amorphous solid , amorphous silicon , rounding , silicon , materials science , passivation , wafer , square pyramid , fabrication , optoelectronics , crystalline silicon , solar cell , monocrystalline silicon , nanotechnology , optics , chemistry , crystallography , physics , computer science , metallurgy , medicine , alternative medicine , layer (electronics) , pathology , copper , operating system
The first step in the fabrication of SHJ (silicon heterojunction) solar cells is forming random pyramids on the Si wafer surfaces. The pyramid profile would affect the following amorphous silicon deposition. Two CP (chemical polishing) solutions consist of HNO 3 + HF and O 3 + HF, respectively, are used to modify the pyramid profile. It is found that these two solutions have selective rounding effects on the pyramid profiles. The first one rounds the pyramid valleys and the second one rounds the pyramid peaks. The combination of the two CP methods improves the passivation quality of amorphous silicon and promotes the conversion efficiency of SHJ cells.