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Design and Fabrication of an All‐Solid‐State Thin‐Film Li‐Ion Microbattery with Amorphous TiO 2 as the Anode
Author(s) -
Feng Jinkui,
Yan Binggong,
Lai Man O.,
Li Lu
Publication year - 2014
Publication title -
energy technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.91
H-Index - 44
eISSN - 2194-4296
pISSN - 2194-4288
DOI - 10.1002/ente.201300173
Subject(s) - amorphous solid , anode , materials science , thin film , electrolyte , electrode , electrochemistry , sputter deposition , sputtering , analytical chemistry (journal) , chemical engineering , deposition (geology) , nanotechnology , chemistry , crystallography , chromatography , engineering , paleontology , sediment , biology
We have fabricated an all‐solid‐state thin film microbattery by using reactive radio frequency (RF) magnetron sputtering of the positive LiNi 1/3 Mn 1/3 Co 1/3 O 2 (LNMC) electrode at an elevated temperature, amorphous Li 3+ x PO 4− x N x (LiPON) electrolyte at room temperature, and in situ deposition of an amorphous titania (TiO 2 ) film below 200 °C. Electrochemical measurement of the TiO 2 half‐cell reveals a first discharge capacity of 102 μAh cm −2 μm −1 with 86 % capacity retention after 100 cycles. A capacity of 58 μAh cm −2 μm −1 from the LNMC thin film electrode can be achieved. The initial capacity of the TiO 2 /LiPON/LNMC full‐cell is as high as 52 μAh cm −2 μm −1 and 90 % capacity is retained after 400 cycles.