Premium
Temperature Compensation by Calibration Transfer for an AC Voltammetric Analyzer of Electroplating Baths
Author(s) -
Jaworski Aleksander,
Wikiel Hanna,
Wikiel Kazimierz
Publication year - 2017
Publication title -
electroanalysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.574
H-Index - 128
eISSN - 1521-4109
pISSN - 1040-0397
DOI - 10.1002/elan.201600488
Subject(s) - calibration , piecewise , compensation (psychology) , electroplating , analyte , biological system , spectrum analyzer , standardization , analytical chemistry (journal) , chemistry , materials science , computer science , process engineering , nanotechnology , chromatography , mathematics , engineering , statistics , psychology , mathematical analysis , telecommunications , layer (electronics) , psychoanalysis , biology , operating system
The application of methods for mitigating the effects of temperature fluctuations on the analytical performance of an in‐situ DC‐ and AC‐voltammetric sensor employed for electroplating process control in semiconductor manufacturing is presented. This sensor is a part of an automated analytical system capable of predicting concentration values of deliberately‐added bath constituents based on the component‐specific multivariate voltammetric responses. However, these responses include physicochemical phenomena, some of which are strongly dependent on temperature; therefore temperature fluctuations can produce an additional source of variance in the voltammetric responses adversely affecting the accuracy of analyte concentration predictions. Several calibration‐transfer‐based techniques, both discrete and continuous, using Piecewise Direct Standardization and Direct Standardization combined with PCR and PLS analytical models are comparatively validated for temperature compensation using AC voltammetric data for the example of accelerator additive. An extension of implementation of continuous methods for Direct Standardization is proposed along with an introduction of a new hybrid method of Standardization Models.