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Sensing with Nafion Coated Carbon Nanotube Field‐Effect Transistors
Author(s) -
Star Alexander,
Han TzongRu,
Joshi Vikram,
Stetter Joseph R.
Publication year - 2004
Publication title -
electroanalysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.574
H-Index - 128
eISSN - 1521-4109
pISSN - 1040-0397
DOI - 10.1002/elan.200302925
Subject(s) - nafion , carbon nanotube , materials science , field effect transistor , carbon nanotube field effect transistor , nanotechnology , transistor , layer (electronics) , electrochemistry , polymer , ion , optoelectronics , voltage , chemical engineering , electrode , chemistry , electrical engineering , organic chemistry , composite material , engineering
Sequential CVD and CMOS processes were used to make a FET that has single walled carbon nanotubes to serve as the conducting source to drain channel. This structure can be decorated to provide gas and liquid responses and herein is evaluated as a humdity sensor. The Na + , K + , and Ca 2+ ion‐exchanged Nafion polymer acts as the chemically sensitive layer in this electrochemical sensor. The effect of gate voltage on the charge‐sensitive NT structure was found to be RH dependent over the range of 12–93% RH with msec response time.