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Study on Structural and Thermal Characteristics of Heteroleptic Yttrium Complexes as Potential Precursors for Vapor Phase Deposition
Author(s) -
Beer Sebastian M. J.,
Krusenbaum Annika,
Winter Manuela,
Vahlas Constantin,
Devi Anjana
Publication year - 2020
Publication title -
european journal of inorganic chemistry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.667
H-Index - 136
eISSN - 1099-0682
pISSN - 1434-1948
DOI - 10.1002/ejic.202000436
Subject(s) - homoleptic , cyclopentadienyl complex , chemistry , yttrium , atomic layer deposition , thermal stability , thermogravimetric analysis , context (archaeology) , inorganic chemistry , oxide , organic chemistry , metal , layer (electronics) , catalysis , paleontology , biology
Yttrium oxide (Y 2 O 3 ) thin films are implemented as a functional component in a broad field of applications such as optics, electronics or thermal barrier coatings. Atomic layer deposition (ALD) is a promising technique to fabricate high‐quality thin films with atomic level precision in which the precursor choice plays a crucial role in process development. The limited number of suitable yttrium precursors available for ALD of Y 2 O 3 has triggered increasing research activity seeking new or modified precursors. In this study, heteroleptic compounds of yttrium bearing the cyclopentadienyl (Cp) ligand in combination with the chelating amidinate or guanidinate ligands were targeted as potential precursors for ALD. In this context, a systematic and comparative study of the structure and thermal characteristics of (bis‐cyclopentadienyl‐( N,N' ‐diisopropyl‐2‐methyl‐amidinato)yttrium) [YCp 2 (dpamd)] 1 and (bis‐cyclopentadienyl‐( N,N' ‐diisopropyl‐2‐dimethylamido‐guanidinato)yttrium) [YCp 2 (dpdmg)] 2 was performed. Complementary characterization tools such as 1 H‐NMR, elemental analysis, electron‐impact mass spectrometry (EI‐MS) and single‐crystal X‐ray diffraction (XRD) confirmed the spectroscopic purity and the monomeric nature of the metalorganic compounds. Hirshfeld surface analysis revealed influence of the ligand choice on the intermolecular interactions of the compounds. The important figures of merit for a precursor, namely the thermal properties were investigated via thermogravimetric analysis. Thus, the volatility, transport behavior and thermal stability were examined and compared to their homoleptic counterparts [YCp 3 ], [Y(dpamd) 3 ] or [Y(dpdmg) 3 ].