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Synthesis of WN(NMe 2 ) 3 as a Precursor for the Deposition of WN x Nanospheres
Author(s) -
McClain K. Randall,
O'Donohue Christopher,
Shi Zhiwei,
Walker Amy V.,
Abboud Khalil A.,
Anderson Tim,
McElweeWhite Lisa
Publication year - 2012
Publication title -
european journal of inorganic chemistry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.667
H-Index - 136
eISSN - 1099-0682
pISSN - 1434-1948
DOI - 10.1002/ejic.201200254
Subject(s) - chemistry , x ray photoelectron spectroscopy , chemical vapor deposition , deposition (geology) , alkoxide , crystallography , analytical chemistry (journal) , catalysis , nuclear magnetic resonance , organic chemistry , paleontology , physics , sediment , biology
The WN x precursor WN(NMe 2 ) 3 was prepared from WN(O t Bu) 3 and Zr(NMe 2 ) 4 by using an amide/alkoxide exchange reaction. Structural analysis of WN(NMe 2 ) 3 revealed an overall pseudo‐tetrahedral geometry with a distortion towards trigonal pyramidal. Aerosol‐assisted chemical vapor deposition (AACVD) from WN(NMe 2 ) 3 resulted in deposition of WN x nanospheres onto Si(100) and Si(111) substrates at low temperatures (75–125 °C). The nanospheres were imaged by SEM and characterized by using energy dispersive spectroscopy (EDS) and X‐ray photoelectron spectroscopy (XPS). These preliminary results demonstrate the viability of WN(NMe 2 ) 3 as a single‐source precursor for the deposition of WN x at low temperature.