Synthesis of WN(NMe 2 ) 3  as a Precursor for the Deposition of WN  x   Nanospheres | Zendy

McClain K. Randall | Zendy; O'Donohue Christopher | Zendy; Shi Zhiwei | Zendy; Walker Amy V. | Zendy; Abboud Khalil A. | Zendy; Anderson Tim | Zendy; McElweeWhite Lisa | Zendy

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Synthesis of WN(NMe 2 ) 3 as a Precursor for the Deposition of WN x Nanospheres

Author(s) -

McClain K. Randall,

O'Donohue Christopher,

Shi Zhiwei,

Walker Amy V.,

Abboud Khalil A.,

Anderson Tim,

McElweeWhite Lisa

Publication year - 2012

Publication title -

european journal of inorganic chemistry

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.667

H-Index - 136

eISSN - 1099-0682

pISSN - 1434-1948

DOI - 10.1002/ejic.201200254

Subject(s) - chemistry , x ray photoelectron spectroscopy , chemical vapor deposition , deposition (geology) , alkoxide , crystallography , analytical chemistry (journal) , catalysis , nuclear magnetic resonance , organic chemistry , paleontology , physics , sediment , biology

The WN x precursor WN(NMe 2 ) 3 was prepared from WN(O t Bu) 3 and Zr(NMe 2 ) 4 by using an amide/alkoxide exchange reaction. Structural analysis of WN(NMe 2 ) 3 revealed an overall pseudo‐tetrahedral geometry with a distortion towards trigonal pyramidal. Aerosol‐assisted chemical vapor deposition (AACVD) from WN(NMe 2 ) 3 resulted in deposition of WN x nanospheres onto Si(100) and Si(111) substrates at low temperatures (75–125 °C). The nanospheres were imaged by SEM and characterized by using energy dispersive spectroscopy (EDS) and X‐ray photoelectron spectroscopy (XPS). These preliminary results demonstrate the viability of WN(NMe 2 ) 3 as a single‐source precursor for the deposition of WN x at low temperature.

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