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Aerosol‐Assisted Chemical Vapor Deposition of NbS 2 and TaS 2 Thin Films from Pentakis(dimethylamido)metal Complexes and 2‐Methylpropanethiol
Author(s) -
Peters Emily S.,
Carmalt Claire J.,
Parkin Ivan P.,
Tocher Derek A.
Publication year - 2005
Publication title -
european journal of inorganic chemistry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.667
H-Index - 136
eISSN - 1099-0682
pISSN - 1434-1948
DOI - 10.1002/ejic.200500400
Subject(s) - chemistry , x ray photoelectron spectroscopy , tantalum , chemical vapor deposition , raman spectroscopy , dichloromethane , thin film , scanning electron microscope , sulfide , toluene , analytical chemistry (journal) , solvent , nuclear chemistry , organic chemistry , nanotechnology , chemical engineering , physics , materials science , optics , quantum mechanics , engineering
Thin films of NbS 2 and TaS 2 have been produced from [M(NMe 2 ) 5 ] (M = Nb, Ta) and t BuSH by aerosol‐assisted chemical vapor deposition on glass. Gold‐colored, reflective films were obtained and deposition took place at 250–350 °C for NbS 2 and 225–450 °C for TaS 2 using dichloromethane or hexanes as solvent. The niobium and tantalum sulfide films were analyzed by Raman spectroscopy, scanning electron microscopy (SEM), X‐ray powder diffraction, energy dispersive analysis of X‐rays (EDAX) and X‐ray photoelectron spectroscopy (XPS). In order to identify possible compounds present in the aerosol mist, the solution phase reaction of [M(NMe 2 ) 5 ] and five equivalents of t BuSH in toluene at room temperature was carried out. Yellow crystals of the partially substituted tantalum thiolate [Ta(S‐ t Bu) 2 (NMe 2 ) 3 ] were isolated. The X‐ray structure of [Ta(S‐ t Bu) 2 (NMe 2 ) 3 ] has been determined. (© Wiley‐VCH Verlag GmbH & Co. KGaA, 69451 Weinheim, Germany, 2005)