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Thin film coating techniques on wires and inner walls of small tubes via cylindrical magnetron sputtering
Author(s) -
Hoshi Youichi,
Naoe Masahiko,
Yamanaka Shun'Ichi
Publication year - 1983
Publication title -
electrical engineering in japan
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.136
H-Index - 28
eISSN - 1520-6416
pISSN - 0424-7760
DOI - 10.1002/eej.4391030104
Subject(s) - engineering , engineering physics , mechanical engineering , sputter deposition , electrical engineering , science and engineering , coating , sputtering , materials science , thin film , nanotechnology , engineering ethics
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