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Effects of gas‐flow rates on operational characteristics of induction‐coupled argon plasmas
Author(s) -
Nomoto Yukihara
Publication year - 1981
Publication title -
electrical engineering in japan
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.136
H-Index - 28
eISSN - 1520-6416
pISSN - 0424-7760
DOI - 10.1002/eej.4391010405
Subject(s) - plasma , argon , volumetric flow rate , physics , atomic physics , materials science , mechanics , nuclear physics