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Preparation of amorphous films of rare earth‐transition metal system by co‐sputtering
Author(s) -
Yamamoto Hiroshi,
Naoe Masahiko,
Yamanaka Syunichi
Publication year - 1977
Publication title -
electrical engineering in japan
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.136
H-Index - 28
eISSN - 1520-6416
pISSN - 0424-7760
DOI - 10.1002/eej.4390970603
Subject(s) - engineering physics , amorphous solid , rare earth , sputtering , citation , library science , engineering , nanotechnology , materials science , computer science , thin film , chemistry , metallurgy , crystallography