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Integrated hybrid MEMS hydrogen sensor with high sensitivity and high dynamic range
Author(s) -
Hayashi Yumi,
Yamazaki Hiroaki,
Masunishi Kei,
Ono Daiki,
Saito Tomohiro,
Nakamura Naofumi,
Kojima Akihiro
Publication year - 2021
Publication title -
electrical engineering in japan
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.136
H-Index - 28
eISSN - 1520-6416
pISSN - 0424-7760
DOI - 10.1002/eej.23317
Subject(s) - hydrogen sensor , microelectromechanical systems , capacitive sensing , hydrogen , materials science , thermal conductivity , sensitivity (control systems) , optoelectronics , analytical chemistry (journal) , electronic engineering , electrical engineering , chemistry , engineering , composite material , palladium , biochemistry , organic chemistry , chromatography , catalysis
This paper discusses an integrated hybrid MEMS hydrogen sensor that detects hydrogen in the range from 5 ppm to 100 vol%. The sensor is a single chip comprising both capacitive and thermal conductivity hydrogen sensors that can be fabricated simultaneously using the same process flow. The capacitive sensor detected hydrogen at concentrations as low as 5 ppm without a heater. The thermal conductivity sensor measured high hydrogen concentrations and had a low power consumption of several tens of milliwatts. The integrated hybrid MEMS hydrogen sensor showed a high gas selectivity.
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