Premium
Fabrication and evaluation of suspended Micro‐heater using TiN
Author(s) -
Ito Hiroshi,
Kawamata Yoshio,
Nikkuni Hiroyuki
Publication year - 2021
Publication title -
electrical engineering in japan
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.136
H-Index - 28
eISSN - 1520-6416
pISSN - 0424-7760
DOI - 10.1002/eej.23308
Subject(s) - materials science , tin , microelectromechanical systems , sputtering , dissipation , photolithography , fabrication , annealing (glass) , substrate (aquarium) , optoelectronics , composite material , thin film , metallurgy , nanotechnology , medicine , alternative medicine , pathology , oceanography , physics , geology , thermodynamics
In this study, suspended micro‐heater using TiN for decreasing power dissipation was fabricated and evaluated. The self‐supporting film of the suspended filament was developed by the low compressive stress SiO 2 film deposited by the dc reactive sputtering method with rf substrate bias and the post annealing at 900°C. In the suspended structure process, single photolithography process and two wet etching process of HF and KOH solution were used. The power dissipation of the suspended heaters was obtained about 70 mW and it is indicated that the power dissipation is able to reduce than the other structure in previous research. Then, it is expected that the TiN micro‐heater using suspended structure is applicable to several MEMS sensors.