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Electromagnetic silicon MEMS resonator
Author(s) -
Watanabe Yoshiyuki,
Yahagi Toru,
Abe Yutaka,
Murayama Hiroki
Publication year - 2019
Publication title -
electrical engineering in japan
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.136
H-Index - 28
eISSN - 1520-6416
pISSN - 0424-7760
DOI - 10.1002/eej.23154
Subject(s) - resonator , microelectromechanical systems , materials science , electromotive force , resonance (particle physics) , silicon , voltage , vibration , mechanical resonance , acoustics , optoelectronics , stress (linguistics) , electrical engineering , engineering , physics , atomic physics , linguistics , philosophy
We have fabricated a silicon MEMS resonator aiming at multimodal sensors, and evaluated vibration characteristics by electromagnetic drive and induced electromotive force detection. The resonance frequency of the driving voltage of 0.6 Vpp shows torsional vibration of approximately 87 kHz, and the resonance frequency is shifted toward the low‐frequency side as the driving voltage increases. Resonance characteristics due to temperature change and film stress were evaluated.