A 3‐DOF Inchworm Using Levitation Caused by Vertical Vibration

SUMMARY We propose a 3‐DOF inchworm‐type microactuator that uses levitation generated by vertical vibration. The vertical vibration is created by a piezoelectric actuator. The inchworm typically consists of thrust elements and clamp elements. The proposed inchworm, however, does not use any clamp elements. Four levitation elements are connected with four thrust elements, which are stacked‐type piezoelectric actuators. The levitation element consists of a mass, a piezoelectric actuator, and a plate. The vertical vibration of the piezoelectric actuator lifts the levitation elements, which eliminates any friction. By controlling the order of the deformation of the horizontal piezoelectric actuators and the vibration of the vertical piezoelectric actuators, the inchworm engages in linear and rotational motion. The levitation height and the linear and rotational displacement of the inchworm were measured. Experimental results demonstrated the feasibility of the proposed 3‐DOF inchworm. The mechanism described in this paper is effective for a precision positioning system in a clean room.