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High‐precision positioning with strain feedback using piezoelectric element
Author(s) -
Seki Kenta,
Mochizuki Keisuke,
Iwasaki Makoto,
Hirai Hiromu
Publication year - 2012
Publication title -
electrical engineering in japan
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.136
H-Index - 28
eISSN - 1520-6416
pISSN - 0424-7760
DOI - 10.1002/eej.21267
Subject(s) - compensation (psychology) , vibration , piezoelectricity , positioning system , bandwidth (computing) , piezoelectric sensor , vibration control , signal (programming language) , engineering , electronic engineering , control theory (sociology) , acoustics , computer science , structural engineering , control (management) , electrical engineering , telecommunications , physics , artificial intelligence , psychology , programming language , psychoanalysis , node (physics)
Abstract This paper presents a novel control methodology for robust high‐precision positioning systems. This methodology is based on strain feedback using a piezoelectric element. The mechanical vibration modes at around the control bandwidth cause deterioration of system stability. This prevents the positioning performance from being robust, particularly against variations in the vibration frequency. In this research, therefore, a robust positioning system was designed by applying an additional compensation loop by strain feedback; here, a piezoelectric element that acts as a strain sensor detects the vibration signal. This makes the performance of the system robust. The proposed compensation approach has been verified by numerical analyses and by experiments using a positioning device for industrial galvano scanners. © 2012 Wiley Periodicals, Inc. Electr Eng Jpn, 179(4): 41–50, 2012; Published online in Wiley Online Library ( wileyonlinelibrary.com ). DOI 10.1002/eej.21267