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A zone‐control induction heating (ZCIH) system for semiconductor processing
Author(s) -
Fujita Hideaki,
Ozaki Kazuhiro,
Uchida Naoki
Publication year - 2010
Publication title -
electrical engineering in japan
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.136
H-Index - 28
eISSN - 1520-6416
pISSN - 0424-7760
DOI - 10.1002/eej.20908
Subject(s) - induction heating , inverter , exothermic reaction , inductance , electromagnetic coil , electrical engineering , engineering , electronic engineering , materials science , physics , voltage , thermodynamics
This paper proposes a new induction heating technology capable of controlling a precise exothermic distribution, which is termed zone‐control induction heating (ZCIH). The ZCIH system consists of two or more sets of a high‐frequency inverter unit and a work coil. The inverter units control the phase angle of the coil current to be in phase with each other. The ZCIH has the capability of operation with the mutual inductance, and enables locating the coils as close as possible. As a result, the ZCIH technology makes it possible to achieve rapid heating performance with extremely precise exothermic distribution. This paper presents experimental results of a 150‐kW six‐zone ZCIH system for semiconductor heat processing. © 2010 Wiley Periodicals, Inc. Electr Eng Jpn, 171(1): 37–45, 2010; Published online in Wiley InterScience ( www.interscience. wiley.com ). DOI 10.1002/eej.20908