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Heat flux into the substrate and electric power measurement in radio frequency discharge plasma
Author(s) -
Hachiya Kenichiro,
Ebe Kentaro,
Kato Syouji,
Mukaigawa Seiji,
Takaki Koichi,
Fujiwara Tamiya
Publication year - 2006
Publication title -
electrical engineering in japan
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.136
H-Index - 28
eISSN - 1520-6416
pISSN - 0424-7760
DOI - 10.1002/eej.20295
Subject(s) - heat flux , electrode , materials science , plasma , ambipolar diffusion , electron temperature , radio frequency , atomic physics , analytical chemistry (journal) , substrate (aquarium) , flux (metallurgy) , diffusion , electrical engineering , chemistry , thermodynamics , heat transfer , physics , quantum mechanics , oceanography , chromatography , geology , metallurgy , engineering
Abstract We performed measurements of the radio frequency power and temperature of electrodes and plasma parameters of rf discharge. The purpose of this research is to check the accuracy of the measurement of energy consumed in plasmas. The heat energy in plasma was obtained by heat flux that was calculated from substrate temperature. The temperature was measured by a laser interferometer using LiNbO 3 crystals. In the case of electrode spacings of 2, 3, and 4 cm, the heat energy toward electrodes was 7.7, 5.4, and 4.0 W, respectively. The current and voltage measurement was made at the driven electrode. The input power was 8.2, 5.1, and 7.7 W for electrode spacings of 2, 3, and 4 cm, respectively. The heat energy calculation based on the electron density distribution measured was conducted by estimating the Bohm flux and ambipolar diffusion flux. It was found that the heat energy toward electrodes was 1.4, 1.8, and 1.5 W for electrode spacings of 2, 3, and 4 cm, respectively, and the heat toward the wall was negligible. © 2006 Wiley Periodicals, Inc. Electr Eng Jpn, 155(1): 1–8, 2006; Published online in Wiley InterScience ( www.interscience.wiley.com ). DOI 10.1002/eej.20295