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Characteristic performance of radio‐frequency (RF) plasma heating using inverter RF power supplies
Author(s) -
Imai Takahiro,
Sawada Hiroyuki,
Hattori Norifumi,
Uesugi Yoshihiko,
Takamura Shuichi
Publication year - 2002
Publication title -
electrical engineering in japan
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.136
H-Index - 28
eISSN - 1520-6416
pISSN - 0424-7760
DOI - 10.1002/eej.1136
Subject(s) - rf power amplifier , radio frequency , plasma , power (physics) , antenna (radio) , materials science , dielectric heating , voltage , electrical engineering , nuclear magnetic resonance , physics , optoelectronics , engineering , amplifier , nuclear physics , cmos , quantum mechanics , dielectric
High‐heat‐flux plasmas are produced by high‐power (∼14 kW) ICRF heating using inverter power supplies in the linear diverter simulator NAGDIS‐II. The power flow of radiated RF power is investigated by a calorimetric method. From conventional power calculation using antenna voltage and current, about 70% of the RF power is radiated into the plasma. But the increase of the plasma heat load along the magnetic field by RF heating is about 10% of the RF power. Through this experiment, we find that about half of the RF power is lost at the antenna surface through the formation of RF‐induced sheath, and about 30% of the power is lost into the wall of the vacuum vessel through the charge exchange and elastic collision of ions with neutrals. © 2002 Scripta Technica, Electr Eng Jpn, 138(4): 34–41, 2002; DOI 10.1002/eej.1136