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Stable operation region and dynamic behavior of Ar pulse‐modulated induction thermal plasma with different molecular gases
Author(s) -
Tanaka Yasunori,
Sakuta Tadahiro
Publication year - 2003
Publication title -
electrical engineering in japan
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.136
H-Index - 28
eISSN - 1520-6416
pISSN - 0424-7760
DOI - 10.1002/eej.10144
Subject(s) - plasma , materials science , thermal , transient (computer programming) , atomic physics , excitation , excitation temperature , line (geometry) , analytical chemistry (journal) , steady state (chemistry) , pulse (music) , plasma parameters , spectral line , chemistry , physics , thermodynamics , optics , emission spectrum , nuclear physics , geometry , mathematics , chromatography , quantum mechanics , astronomy , computer science , operating system , detector
The pulse‐modulated induction thermal plasma (PMITP) was established in Ar gas with additional gases such as H 2 , O 2 , N 2 , and CO 2 to investigate the effects of various gas inclusions on the transient characteristics of thermal plasma. The dynamic response times of the thermal plasmas were estimated from the measured time‐varying radiation intensity of Ar spectral line. Furthermore, time evolution of the Ar excitation temperature was determined by the two‐line method. The results indicated that especially in Ar‐CO 2 PMITP, decreasing the current level in a modulation cycle raised the on‐delay time which means a recovery time from a low‐temperature state to a high‐temperature one. In addition, the inclusion of CO 2 in Ar PMITP caused lower temperatures just before the on‐operation compared with other gases used in the experiment. © 2003 Wiley Periodicals, Inc. Electr Eng Jpn, 143(4): 1–11, 2003; Published online in Wiley InterScience ( www.interscience.wiley.com ). DOI 10.1002/eej.10144

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