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Investigation of fabrication conditions for VO 2 thin films by MOD using carbon thermal reduction
Author(s) -
Fujishiro Yuhi,
Kawahara Masami,
Samura Tsuyoshi,
Tachiki Takashi,
Uchida Takashi
Publication year - 2021
Publication title -
electronics and communications in japan
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.131
H-Index - 13
eISSN - 1942-9541
pISSN - 1942-9533
DOI - 10.1002/ecj.12306
Subject(s) - materials science , mod , thin film , hysteresis , carbon fibers , thermal decomposition , atmospheric temperature range , analytical chemistry (journal) , fabrication , vanadium , diffraction , phase (matter) , chemical engineering , nanotechnology , composite material , chemistry , optics , metallurgy , thermodynamics , organic chemistry , condensed matter physics , composite number , medicine , physics , alternative medicine , engineering , pathology , artificial intelligence , computer science
Vanadium dioxide (VO 2 ) thin films were fabricated by metal‐organic decomposition (MOD). To utilize a carbon thermal reduction for obtaining a VO 2 composition, the precursor films were fabricated at the temperature Tp from 300°C to 380°C in a N 2 atmosphere. From the measurement results of XRD, diffraction peaks indicating VO 2 phase were observed with a wide range of firing temperatures from Tf = 560°C to 620°C. Furthermore, the peaks indicating VO 2 phase were also observed with a wide range of firing time from t f = 15–45 min. Regarding the surface morphology of the films, the nanoparticles of 100–200 nm were densely packed although small spaces existed between the particles. The R ‐ T characteristics of the films indicated the phase transition with a rapid resistance change of about three orders of magnitude and hysteresis loop. From these experimental results, it was found that wide windows of firing conditions for fabricating VO 2 thin film can be obtained in the MOD process using the carbon thermal reduction.