Premium
Development of a self‐heated‐stage for high‐speed process of titanium by reactive ion etching
Author(s) -
Kiryu Yuya,
Han Gang,
Imai Junichi,
Sohgawa Masayuki,
Abe Takashi
Publication year - 2020
Publication title -
electronics and communications in japan
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.131
H-Index - 13
eISSN - 1942-9541
pISSN - 1942-9533
DOI - 10.1002/ecj.12227
Subject(s) - titanium , materials science , stage (stratigraphy) , reactive ion etching , etching (microfabrication) , capacitance , thermal , titanium alloy , radio frequency , third stage , alloy , metallurgy , composite material , optoelectronics , electrical engineering , chemistry , electrode , engineering , paleontology , layer (electronics) , biology , training (meteorology) , physics , meteorology
Abstract In this study, we developed a detachable self‐heated‐stage suitable for high‐speed processing of titanium by thermally assisted reactive ion etching (TRIE). The detachable self‐heated stage was designed based on simulation results. The temperature of the stage increases rapidly within 10 minutes with low radio frequency (RF) power, because of the low thermal capacitance. The etch rates of titanium and titanium alloy by the TRIE improved compared with those of titanium and titanium alloy by a regular RIE. In addition, the replacement of the developed stage with another stage became easier than the previous stage.