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Development of MEMS liquid cell to visualize the dynamics of bubbles and droplets at the microscale
Author(s) -
Ishida Tadashi
Publication year - 2019
Publication title -
electronics and communications in japan
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.131
H-Index - 13
eISSN - 1942-9541
pISSN - 1942-9533
DOI - 10.1002/ecj.12205
Subject(s) - microscale chemistry , microchannel , scanning electron microscope , microelectromechanical systems , materials science , membrane , electron microscope , nanotechnology , optics , optoelectronics , composite material , chemistry , physics , biochemistry , mathematics education , mathematics
I developed a microelectromechanical system (MEMS) liquid cell for the visualization of bubbles and droplets at the microscale using a scanning electron microscope (SEM). The MEMS liquid cell has an electron transparent membrane and a microchannel. The electron transparent membrane was 80‐nm‐thick Si 3 N 4 . I tested the wettability of the electron transparent membrane and liquid leakage, and simulated the scattering of an electron beam. The MEMS liquid cell was equipped on the SEM custom‐made holder for in‐liquid specimens. I observed the floating of bubbles in the microchannel and the formation and growth of droplets on the electron transparent membrane at the microscale using an SEM.