Deposition of hydrophilic amorphous carbon film with ether as a source molecule and analysis of its deposition reaction | Zendy

Shinohara Masanori | Zendy; Tominaga Taisuke | Zendy; Shimomura Hayato | Zendy; Ihara Takeshi | Zendy; Yagyu Yoshihito | Zendy; Ohshima Tamiko | Zendy; Kawasaki Hiroharu | Zendy

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Deposition of hydrophilic amorphous carbon film with ether as a source molecule and analysis of its deposition reaction

Author(s) -

Shinohara Masanori,

Tominaga Taisuke,

Shimomura Hayato,

Ihara Takeshi,

Yagyu Yoshihito,

Ohshima Tamiko,

Kawasaki Hiroharu

Publication year - 2019

Publication title -

electronics and communications in japan

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.131

H-Index - 13

eISSN - 1942-9541

pISSN - 1942-9533

DOI - 10.1002/ecj.12157

Subject(s) - molecule , amorphous carbon , deposition (geology) , amorphous solid , hydrocarbon , carbon film , ether , chemical vapor deposition , carbon fibers , materials science , chemical engineering , isopropyl alcohol , carbon source , thin film , organic chemistry , chemistry , nanotechnology , composite material , composite number , geology , paleontology , sediment , engineering , biochemistry

A hydrophilic amorphous carbon film was deposited with plasma‐enhanced chemical vapor deposition using diisopropylether ((i‐C 3 H 7 ) 2 O) as a source molecule. Bonding states of hydrocarbon in the deposited film are comprised of sp 3 ‐hydrocarbon components, which is the same as the isopropyl group in the source molecule. On the other hand, C═O bonding is formed in the deposited film, not as similar to the source molecule, diisopropylether. These results suggest that C─O─C in the source molecule would be cleaved. This study would propose a new deposition method of a hydrophilic amorphous carbon film with ether as a source molecule.

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