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Strain sensors and pressure sensors using Cr─N thin films for high‐pressure hydrogen gas
Author(s) -
Niwa Eiji,
Mikami Hiroshi
Publication year - 2018
Publication title -
electronics and communications in japan
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.131
H-Index - 13
eISSN - 1942-9541
pISSN - 1942-9533
DOI - 10.1002/ecj.12111
Subject(s) - hydrogen , thin film , materials science , gauge factor , strain gauge , diaphragm (acoustics) , substrate (aquarium) , pressure sensor , hydrogen sensor , strain (injury) , composite material , stress (linguistics) , pressure measurement , analytical chemistry (journal) , optoelectronics , nanotechnology , chemistry , acoustics , thermodynamics , fabrication , vibration , palladium , alternative medicine , oceanography , pathology , biochemistry , chromatography , medicine , catalysis , physics , organic chemistry , geology , philosophy , linguistics
The authors investigated the influence of hydrogen on Cr–N strain‐sensitive thin films, which have a gauge factor of about 14, to develop a high‐sensitive strain sensor for high‐pressure hydrogen gas. As a result, it was found that the thin film was not affected by hydrogen and the specimen of Cr–N thin film on Zirconia substrate showed a sensitive and linear output to the pressure. It was considered that the Cr–N thin films were able to be expected as not only high‐sensitive strain sensors but also diaphragm‐less pressure sensors in high‐pressure hydrogen gas.