Meandering Coplanar Line Type Thin‐Film Magnetic Field Sensor with Direct Bias | Zendy

YABUKAMI SHIN | Zendy; UETAKE HIROAKI | Zendy; MORIYA KENTA | Zendy; TOMINAMI TSUYOSHI | Zendy; ONODERA HIDEHIKO | Zendy

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Meandering Coplanar Line Type Thin‐Film Magnetic Field Sensor with Direct Bias

Author(s) -

YABUKAMI SHIN,

UETAKE HIROAKI,

MORIYA KENTA,

TOMINAMI TSUYOSHI,

ONODERA HIDEHIKO

Publication year - 2018

Publication title -

electronics and communications in japan

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.131

H-Index - 13

eISSN - 1942-9541

pISSN - 1942-9533

DOI - 10.1002/ecj.12039

Subject(s) - biasing , materials science , amorphous solid , thin film , direct current , electrical conductor , line (geometry) , magnetic field , nuclear magnetic resonance , condensed matter physics , optoelectronics , voltage , composite material , electrical engineering , nanotechnology , physics , crystallography , chemistry , geometry , mathematics , quantum mechanics , engineering

SUMMARY We propose a new simple method to directly apply dc current to the CoNbZr/Cu film of a sensor. A very sensitive thin‐ film sensor was developed using a meandering coplanar line with biasing conductors fabricated from SrTiO film (0.75 μm thick), amorphous Co85Nb12Zr3 film (1.0 mm × 2.45 mm, 1 μm thick) and Cu/Cr film (2 μm/0.1 μm). We discuss direct bias to CoNbZr film and Cu film under a CoNbZr film and compare it with an application of bias magnetic field. Good sensitivity (phase change over 100 degrees/Oe) was obtained by the proposed method.

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