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Meandering Coplanar Line Type Thin‐Film Magnetic Field Sensor with Direct Bias
Author(s) -
YABUKAMI SHIN,
UETAKE HIROAKI,
MORIYA KENTA,
TOMINAMI TSUYOSHI,
ONODERA HIDEHIKO
Publication year - 2018
Publication title -
electronics and communications in japan
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.131
H-Index - 13
eISSN - 1942-9541
pISSN - 1942-9533
DOI - 10.1002/ecj.12039
Subject(s) - biasing , materials science , amorphous solid , thin film , direct current , electrical conductor , line (geometry) , magnetic field , nuclear magnetic resonance , condensed matter physics , optoelectronics , voltage , composite material , electrical engineering , nanotechnology , physics , crystallography , chemistry , geometry , mathematics , quantum mechanics , engineering
SUMMARY We propose a new simple method to directly apply dc current to the CoNbZr/Cu film of a sensor. A very sensitive thin‐ film sensor was developed using a meandering coplanar line with biasing conductors fabricated from SrTiO film (0.75 μm thick), amorphous Co85Nb12Zr3 film (1.0 mm × 2.45 mm, 1 μm thick) and Cu/Cr film (2 μm/0.1 μm). We discuss direct bias to CoNbZr film and Cu film under a CoNbZr film and compare it with an application of bias magnetic field. Good sensitivity (phase change over 100 degrees/Oe) was obtained by the proposed method.