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Fabrication of Ultrasonic Sensors Using Micro Cantilevers and Characteristic Measurement in Vacuum for Acoustic Emission Sensing
Author(s) -
TAKATA KENGO,
SASAKI TAKASHI,
TANAKA MITSUYUKI,
SAITO HIROSHI,
MATSUURA DAISUKE,
HANE KAZUHIRO
Publication year - 2016
Publication title -
electronics and communications in japan
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.131
H-Index - 13
eISSN - 1942-9541
pISSN - 1942-9533
DOI - 10.1002/ecj.11810
Subject(s) - cantilever , acoustic emission , materials science , microelectromechanical systems , fabrication , silicon , acoustics , pressure sensor , optoelectronics , ultrasonic sensor , amplifier , composite material , engineering , mechanical engineering , cmos , physics , medicine , alternative medicine , pathology
SUMMARY Acoustic emission (AE) sensors are attractive for the detection of machine fracture in real time. We fabricated AE sensors using the MEMS technology. The AE sensors consisted of silicon cantilevers resonating at frequencies of 50, 100, and 150 kHz. Silicon piezoresistors were installed close to the cantilevers. In order to obtain an ambient pressure appropriate for the operation of the cantilevers, the Q factor of the cantilevers was calculated by analytical models as a function of pressure. The properties of the fabricated sensors were measured in a vacuum chamber. We also tentatively packaged the AE sensor and an amplifier in a vacuum to decrease the influences of air damping and noise.