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Load Vector Sensors Using Strain‐Sensitive Cr‐N Thin Films and Their Applications
Author(s) -
NIWA EIJI,
SHIRAKAWA KIWAMU,
SHINGYOCHI SHIGEAKI,
XIONG SIBEI,
NAKAHARA KENJI,
ITO TAKAMICHI,
SASAKI YOSHIHIRO
Publication year - 2016
Publication title -
electronics and communications in japan
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.131
H-Index - 13
eISSN - 1942-9541
pISSN - 1942-9533
DOI - 10.1002/ecj.11803
Subject(s) - gauge factor , thin film , strain gauge , fabrication , materials science , electrical resistivity and conductivity , temperature coefficient , strain (injury) , characterization (materials science) , optoelectronics , gauge (firearms) , composite material , electrical engineering , nanotechnology , engineering , metallurgy , medicine , alternative medicine , pathology
SUMMARY Cr‐N thin films, which have a gauge factor of about 16 and a temperature coefficient of resistivity close to zero, are a promising new next‐generation strain gauge material. In this paper, the fabrication and characterization of a single‐module system of the load vector sensor using the Cr‐N strain‐sensitive thin films, which can be applied to sole sensors, are reported.