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Fabrication of Stainless‐Steel Microcoils and Mesh Pipes Using Lithography
Author(s) -
Sakabe Hiroshi,
Horiuchi Toshiyuki
Publication year - 2014
Publication title -
electronics and communications in japan
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.131
H-Index - 13
eISSN - 1942-9541
pISSN - 1942-9533
DOI - 10.1002/ecj.11689
Subject(s) - resist , undercut , materials science , lithography , fabrication , etching (microfabrication) , photoresist , composite material , photolithography , microfabrication , perpendicular , electron beam lithography , microelectromechanical systems , optics , optoelectronics , nanotechnology , layer (electronics) , geometry , medicine , alternative medicine , mathematics , physics , pathology
SUMMARY Precise microcoils and mesh pipes with outer and inner diameters of 100 μm and 60 μm were fabricated using laser‐scan lithography and electrolytic etching. Non‐magnetizable stainless‐steel (SUS304) pipes were coated with resist films, and helical patterns were delineated using a laser‐scan exposure system. Positive resist PMER P‐LA900 was used for fabricating microcoils, and negative resist PMER N‐CA3000 was used for fabricating micromesh pipes. Mesh patterns were formed by doubly delineating helical patterns coiled in opposite directions each other. Widths of resist patterns used for fabricating mesh patterns were also controlled by stitching two helical patterns. Because space widths of coils and sizes of mesh holes became larger than space widths and hole sizes of resist patterns caused by undercut in etching process, widths of resist patterns were adjusted by considering the undercut depths. As a result, pipe specimens were suitably etched in a solution of sodium chloride and ammonium chloride in water, and microcomponents with homogeneous widths were successfully fabricated.