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Study on MEMS Thermal Microactuators with Pedestal‐Type Beam Shape and Au Electroplating
Author(s) -
OCHIAI KUNIYUKI,
OSADA TAKAHIRO,
MURO HIDEO
Publication year - 2014
Publication title -
electronics and communications in japan
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.131
H-Index - 13
eISSN - 1942-9541
pISSN - 1942-9533
DOI - 10.1002/ecj.11632
Subject(s) - microelectromechanical systems , pedestal , electroplating , microactuator , materials science , thermal , actuator , displacement (psychology) , mechanical engineering , optoelectronics , electrical engineering , nanotechnology , engineering , physics , layer (electronics) , psychology , meteorology , psychotherapist
Recently, microfluid systems have been extensively studied, and microactuators such as microvalves fabricated by microelectromechanical systems technology are essential for realizing these systems. In this paper, thermal microactuators of trapezoidal shape fabricated by SOI‐MUMPs technology with and without Au electroplating layers are studied to obtain larger displacement.