An Equivalent Circuit Model for Semiparallel Plate Electrostatic Torsion Mirror | Zendy

Maruyama Satoshi | Zendy; Mita Makoto | Zendy; Isamoto Keiji | Zendy; Chong Changho | Zendy; Fujita Hiroyuki | Zendy; Toshiyoshi Hiroshi | Zendy

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An Equivalent Circuit Model for Semiparallel Plate Electrostatic Torsion Mirror

Author(s) -

Maruyama Satoshi,

Mita Makoto,

Isamoto Keiji,

Chong Changho,

Fujita Hiroyuki,

Toshiyoshi Hiroshi

Publication year - 2014

Publication title -

electronics and communications in japan

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.131

H-Index - 13

eISSN - 1942-9541

pISSN - 1942-9533

DOI - 10.1002/ecj.11486

Subject(s) - torsion (gastropod) , equivalent circuit , deflection (physics) , voltage , nonlinear system , torque , electrostatics , optics , physics , electrical engineering , engineering , medicine , surgery , quantum mechanics , thermodynamics

SUMMARY An equivalent circuit model for a semiparallel plate electrostatic torsion mirror has been developed based on an electrical circuit simulator. An analytical model for the electrostatic torque has been translated into a nonlinear dependent current source as a function of the input voltages that interpret the drive voltages and the mirror angle. Use of the suspension width as a fitting parameter explained well the experimental results on frequency response and the mirror's static deflection. © 2013 Wiley Periodicals, Inc. Electron Comm Jpn, 97(1): 37–47, 2014; Published online in Wiley Online Library ( wileyonlinelibrary.com ). DOI 10.1002/ecj.11486

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