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An Equivalent Circuit Model for Semiparallel Plate Electrostatic Torsion Mirror
Author(s) -
Maruyama Satoshi,
Mita Makoto,
Isamoto Keiji,
Chong Changho,
Fujita Hiroyuki,
Toshiyoshi Hiroshi
Publication year - 2014
Publication title -
electronics and communications in japan
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.131
H-Index - 13
eISSN - 1942-9541
pISSN - 1942-9533
DOI - 10.1002/ecj.11486
Subject(s) - torsion (gastropod) , equivalent circuit , deflection (physics) , voltage , nonlinear system , torque , electrostatics , optics , physics , electrical engineering , engineering , medicine , surgery , quantum mechanics , thermodynamics
SUMMARY An equivalent circuit model for a semiparallel plate electrostatic torsion mirror has been developed based on an electrical circuit simulator. An analytical model for the electrostatic torque has been translated into a nonlinear dependent current source as a function of the input voltages that interpret the drive voltages and the mirror angle. Use of the suspension width as a fitting parameter explained well the experimental results on frequency response and the mirror's static deflection. © 2013 Wiley Periodicals, Inc. Electron Comm Jpn, 97(1): 37–47, 2014; Published online in Wiley Online Library ( wileyonlinelibrary.com ). DOI 10.1002/ecj.11486