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Sacrificial microchannel sealing by glass‐frit reflow for chip scale atomic magnetometer
Author(s) -
Tsujimoto Kazuya,
Hirai Yoshikazu,
Sugano Koji,
Tsuchiya Toshiyuki,
Tabata Osamu
Publication year - 2013
Publication title -
electronics and communications in japan
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.131
H-Index - 13
eISSN - 1942-9541
pISSN - 1942-9533
DOI - 10.1002/ecj.10432
Subject(s) - frit , microchannel , materials science , chip , wafer , magnetometer , silicon , helium , composite material , optoelectronics , electrical engineering , physics , nanotechnology , engineering , atomic physics , quantum mechanics , magnetic field
Abstract A novel sealing technique using sacricial microchannels was proposed for control of an atmosphere in a micromachined alkali metal vapor cell for a chip‐scale atomic magnetometer. The microchannels act as a feedthrough connecting the cell to the outside atmosphere during evacuation and gas lling steps, and eventually they are sealed by glass‐frit reow. A silicon microchannel was designed and sealing by glass‐frit reow was successfully demonstrated in reow experiments. Simulation results claried the glass‐frit reow characteristics and their dependence on cross‐sectional shapes of the microchannels. Hermeticity of the proposed sealing technique at a leak rate of less than 10 −12 Pa·m 3 /s was veried by a high‐resolution helium leak test. © 2013 Wiley Periodicals, Inc. Electron Comm Jpn, 96(5): 58–66, 2013; Published online in Wiley Online Library (wileyonlinelibrary.com). DOI 10.1002/ecj.10432