Open AccessChem. Vap. Deposition (10–11–12/2015)
Author(s) -
Michael L. Hitchman,
Peter Gregorÿ,
Eliza-Beth Lerch,
Michael Beyer,
Heather Elliott,
Sonja Hoffmann
Publication year - 2015
Publication title -
chemical vapor deposition
Language(s) - Uncategorized
Resource type - Journals
eISSN - 1521-3862
pISSN - 0948-1907
DOI - 10.1002/cvde.201571012
Subject(s) - citation , computer science , world wide web