Open AccessChem. Vap. Deposition (10–11–12/2014)
Author(s) -
L Michael,
S Sto ̈ckel,
Susann Ebert,
M Bo,
Andreas Seifert,
Thomas Wamser,
Walter Krenkel,
Steffen Schulze,
Michael Hietschold,
Helmut Gnaegi,
Werner A. Goedel
Publication year - 2014
Publication title -
chemical vapor deposition
Language(s) - Uncategorized
Resource type - Journals
eISSN - 1521-3862
pISSN - 0948-1907
DOI - 10.1002/cvde.201471013
Subject(s) - citation , computer science , deposition (geology) , world wide web , geology , paleontology , sediment