Open AccessMasthead
Author(s) -
Michael L. Hitchman,
Peter Gregory,
Deborah Hollis,
Irene Schmitt,
Ute Robnagel,
Stephan C. Bischoff,
Renate Sutter
Publication year - 1996
Publication title -
chemical vapor deposition
Language(s) - Uncategorized
Resource type - Reports
eISSN - 1521-3862
pISSN - 0948-1907
DOI - 10.1002/cvde.19960020101
Subject(s) - citation , computer science , world wide web