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Full‐dimensional Monte Carlo simulation of glow discharges with superposed magnetic fields
Author(s) -
Heise C.,
Lemke K.,
Kock M.
Publication year - 1997
Publication title -
contributions to plasma physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.531
H-Index - 47
eISSN - 1521-3986
pISSN - 0863-1042
DOI - 10.1002/ctpp.2150370505
Subject(s) - monte carlo method , cathode , computational physics , glow discharge , magnetic field , electron , physics , atomic physics , particle in cell , electric field , sputtering , materials science , plasma , nuclear physics , chemistry , thin film , statistics , mathematics , quantum mechanics
A Monte Carlo simulation code is described that is suitable for modelling low‐pressure glow discharges that possess cylindrical symmetry, but are of otherwise completely variable geometry. In this single‐particle simulation in 3 space and 3 velocity dimensions, an entire discharge including the cathode fall can be modelled with or without magnetic fields of arbitrary shape. Electric and magnetic fields are given externally and are not adjusted self‐consistently. Collision processes are modelled in great detail, and cathode sputtering phenomena are also included in the simulation. This simulation code is applied to hollow cathode discharges with and without superimposed magnetic fields and to a Penning discharge. Exemplary results are shown that include density profiles of cathode‐sputtered atoms, energy distribution functions of electrons and cathode sputtering effects for a Penning discharge. Comparisons to results from experiment and other simulations are given.